VAT 653 Series - Connection Overview

Series 65 INSTALLATION
963283EA Edition 2019-05-03 21/
129
4.2.2 Connection overview
System:
1 Valve
2 Process chamber
3 Gas inlet
4 Pressure sensor(s)
5 Sensor cable(s)
6 Controller and actuator
7 Cable to remote control unit
8 Cable to power supply
9 Pump
Controller:
M
3
4
5
7
8
2
1
9
6