Series 65  INSTALLATION 
 
963283EA  Edition 2019-05-03  95/
 
5  Operation 
 
 
WARNING 
Unqualified personnel 
Inappropriate handling may cause serious injury or property damage. 
Only qualified personnel are allowed to carry out the described work. 
 
 
 
WARNING 
Valve opening 
Risk of serious injury. 
Human body parts must be kept out of the valve opening and away from moving parts. 
Do not connect the controller to power before the valve is installed complete into the 
system. 
 
 
5.1  Normal operation 
This valve is designed for downstream pressure control in vacuum chambers. It can be employed in a 
pressure control mode or a position control mode. In both cases local or remote operation is possible. 
 
 
5.1.1  Remote operation 
This product is equipped with a RS232 interface to allow for remote operation. See section «RS232 
interface» for details. 'Control Performance Analyzer' software may be used for monitoring during remote 
control.  
 
 
'Control Performance Analyzer' 4.0 software 
 
 
sample picture 
 
 
 
 
In case ‘Control Performance Analyzer’ is used, make sure ‘Remote’ button is 
pushed to enable for remote operation.