INSTALLATION Series
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Edition 2019-05-03 963283EA
For RS232 it’s also possible to execute the zero adjust with the object «GENERAL CONTROL SETPOINT» of the PDO
communication. In both case (perform the zero adjust with Sensor Selection, Execute and Execute or GENERAL
CONTROL SETPOINT) the result is the same:
1. Wait until process chamber is evacuated and sensor signal is not shifting anymore. Do not
perform Zero Adjust as long as pressure gauge voltage is shifting otherwise incorrect pressure
reading is the result. Refer to manual of sensor manufacturer for warm up time.
2. In «OUTPUT Buffer» > «GENERAL CONTROL SETPOINT» set Bit 0 (rising etch).
3. Wait until Bit1 of «GENERAL STATUS» is set (see INPUT Buffer).
Do not perform Zero Adjust, if the base pressure of your vacuum system is higher
than 1‰ of sensor full scale. We recommend disabling Zero Adjust function or using
of Zero Adjust.Target Pressure other than 0.0 in this case. Otherwise incorrect
pressure reading is the result.
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