Vacuum System 6
Troubleshooting and Maintenance Manual 99
Foreline Pump
This section lists procedures to maintain the foreline pump. They should be
performed according to the maintenance schedule or as indicated by
instrument symptoms.
To check the oil mist filter
Check the oil mist filter weekly for any damage and collected pump fluid.
• If the oil mist filter is damaged, replace it.
• If oil is found in the oil mist filter, open the gas ballast valve
counterclockwise just enough to return the condensed oil back to the pump.
Close the gas ballast valve clockwise.
Figure 18 Foreline pump
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