Brooks GF Series User Manual

1-2
GF Series
Installation and Operation Manual
X-TMF-GF Series-MFC-eng
Part Number: 541B137AAG
March, 2010
Section 1 Introduction
1-4 Notice and Caution Statements
Warning, caution and notice statements are located throughout this manual
in the ANSI format. A WARNING statement indicates a potentially
hazardous situation which, if not avoided, COULD result in death or serious
injury. A CAUTION statement indicates a potentially hazardous situation
which, if not avoided, MAY result in minor or moderate injury. It may also be
used to alert against unsafe practices. A NOTICE statement describes
specific information that requires special attention.
1-5 Product Warranty
Product warranty information can be found on the Back Cover of this
Manual and on the Brooks website at www.BrooksInstrument.com. This
information provides general warranty information, limitations, disclaimers,
and applicable warranty periods according to product group.
1-6 How to Order a GF1xx Device
Refer to Appendix A.
1-7 Industry Standard References
Refer to Appendix B.
1-8 GF1xx Gas Table
Refer to Appendix C.

Brooks GF Series Specifications

General

Brand	Brooks
Model	GF Series
Category	Controller
Language	English