6-1
GF Series
Installation and Operation Manual
X-TMF-GF Series-MFC-eng
Part Number: 541B137AAG
March, 2010
Section 6 Maintenance Requirements
6-1 Introduction
GF1XX maintenance is discussed below in three areas: Routine
Maintenance, Factory Calibration and Service, and On-Site Service.
6-2 Routine Maintenance
Any precision unit such as a flow controller requires occasional servicing,
especially if it has been operating for an extended period of time. If reactive
gases are being used, it is recommended that you send the GF1xx to a
Brooks Service Center for cleaning and re-calibration at 6 month intervals,
or twice a year. Refer to Section 8 for product removal, product packaging,
and product return instructions.
It is also recommended to re-zero the GF1XX twice a year, or at 6 month
intervals. Refer to Section 5 for zeroing instructions.
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