Brooks GF Series - GF1 XX Mounted to K1 Series Substrate Blocks

3-4
GF Series
Installation and Operation Manual
X-TMF-GF Series-MFC-eng
Part Number: 541B137AAG
March, 2010
Section 3 Installation Instructions
Figure 3-4 GF1XX Mounted to K1 Series Substrate Blocks
2. Select the mounting screws noted in Table 3-1 below for downported
devices. M4 screws are used on 1.125" devices, K1S. M5 screws are
used on 1.5" devices, K1R2 and K1H.
3. Refer to Figure 3-4. Insert the two mounting seals (4) over the gas flow
path of the K1 block. Carefully align the GF1XX mounting holes onto
the K1 substrate blocks. Using your fingers, install the screws through
the GF1XX fitting and hand tighten.
1
3
4
2
Table 3-1 K1 Series Fasteners
Connection
GF1xx
to
Subtstrate
Fastener Size
K1S K1R2 K1H
M4 x 34mm M5 x 30mm M5 x 37mm
or
M4 x35mm