3-2
GF Series
Installation and Operation Manual
X-TMF-GF Series-MFC-eng
Part Number: 541B137AAG
March, 2010
Section 3 Installation Instructions
3-3 Purge the Gas Supply Line Before GF1XX Installation
NOTICE
Before operating the GF1XX, the gas supply line must be completely
purged with nitrogen or argon to ensure the line is free from toxic or
flammable gases, contaminants, moisture, and oxygen. The purge gas
must be free of moisture and oxygen to less than 100 ppb. Purge the gas
lines as follows or in accordance to prescribed company and safety
procedures.
1. Shut off the process gas supply valve(s) upstream of the GF1XX. If
such a valve is not available, shut the valve on the gas panel. Tag the
valve at this point to prevent accidental re-exposure of the process gas
to the gas line.
2. Cycle purge the gas line with dry nitrogen or argon to fully flush out the
process gas. Cycle purging consists of evacuating to a low pressure
adequate to induce out-gassing and then purging to remove adhered
moisture and oxygen. If a toxic or reactive gas is present and a clogged
GF1XX is suspected, then proceed with caution. Pump down and purge
the GF1XX from both downstream and upstream lines. If check valves
are present in the gas line, both pumping down and purging are
required. Pumping down without purging is inadequate. If a good
vacuum source is not available, the GF1XX can be de-contaminated by
purge only.
3. Repeat the purge cycle several times within 2-4 hours to complete the
cleaning. For toxic and corrosive gasses, it is recommended to use
100-120 cycles.
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