Brooks GF Series User Manual

1-1
GF Series
Installation and Operation Manual
X-TMF-GF Series-MFC-eng
Part Number: 541B137AAG
March, 2010
Section 1 Introduction
1-1 Introduction
This user guide covers the GF1XX Series High Performance Gas Flow
Controller as shown in Figure 1-1. Included herein is the general product
information, a product description, operating principles and features,
installation instructions, performance checks, maintenance requirements,
troubleshooting guidelines, and removal and return instructions.
1-2 Intended Use
The GF1XX is designed for semiconductor and other high purity
manufacturing processes where fast settling times and superior flow
accuracy are required. Some of the processes supported by the GF Series
are sub-atmospheric deposition, low pressure plasma deposition, plasma
enhanced atomic layer deposition, rapid thermal processing, UHP gas
blending to name a few.
1-3 Product Support References
Refer to www.BrooksInstrument.com for Brooks sales and service
locations and to obtain other documents that support the GF1XX. Those
documents include:
- Brooks MultiFlo
®
Configurator Software Manual: X-SW-MultiFlo-eng
(0199-002-0003). (Includes MultiFlo gas and flow range information)
- GF1XX Data Sheets: DS-TMF-GF100-MFC-eng (153-30648-000),
DS-TMF-GF120-MFC-eng (153-30649-000) or
DS-TMF-GF125-MFC-eng (153-30650-000) for GF100, GF120 or
GF125, respectively. (Includes performance specifications and
mechanical footprint).
Figure 1-1 GF1XX Series High Performance Gas Flow Controller Analog and
Digital

Brooks GF Series Specifications

General

Brand	Brooks
Model	GF Series
Category	Controller
Language	English