Brooks GF Series - Supplemental Manual

54 pages

Save Page as PDF

To Next Page

Installation and Operation Manual

X-DPT-EtherCAT-GF1XX-MFC-eng

Part Number: 541B219AAG

April, 2017

Supplemental Manual for

Brooks

EtherCAT

Mass Flow Controllers

and Meters

GF Series

Main Page

Table of Contents5
General Information9
Introduction9
Definition of Terms10
Numbers10
Table 1-1 - Definition of Terms10
Quick Start11
Master Hardware11
Physical Interfaces12
Power Supply12
Figure 2-1 - Top View of GF Ethercat Device12
Leds13
Figure 2-2 - M8 Power Connector Location13
Figure 2-3 - M8 Power Connector Drawing13
Table 2-1 - RUN Indicator States14
Table 2-2 - ERROR Indicator States14
Exceptions Display Codes and Reporting15
Table 2-3 - Display Code Summary15
Slave Configuration17
Introduction17
Table 3-1 - Object Dictionary Structure17
Process Data Object (PDO) Mapping18
Rxpdo Mapping18
Txpdo Mapping19
Table 3-2 - Default Rxpdo (MFC/EMFC Profiles)19
Table 3-3 - Default Rxpdo (MFM/EMFM Profiles)19
Table 3-4 - Default Txpdo (EMFC Profile)19
Table 3-5 - Default Txpdo (MFC Profile)20
Table 3-6 - Default Txpdo (MFM Profile)20
Table 3-7 - Default Txpdo (EMFM Profile)20
Communication Specific Data21
Table 3-8 - Communication Specific Data21
Manufacturer Specific Data22
Manufacturer Specific Inputs23
Manufacturer Specific Configuration Data23
Table 3-9 - Manufacturer Specific Inputs23
Table 3-10 - Manufacturer Specific Configuration Data23
SDP Device Type Specific Data24
Input Data24
Table 3-11 - Input Data24
Output Data25
Table 3-12 - Output Data25
Configuration Data26
Table 3-13 - Configuration Data26
Information Data27
Table 3-14 - Information Data27
Semi Device Profile Area29
Table 3-15 - Semi Device Profile29
Value Range Setting30
Exception Handling Data30
Table 3-16 - Value Range Setting30
Manufacturer Specific Device Data32
Table 3-17 - Manufacturer Specific Device Data32
SDP and CDP Device Specific Inputs33
SDP and CDP Device Specific Information Data33
Table 3-18 - SDP and CDP Device Specific Inputs33
Table 3-19 - SDP and CDP Device Specific Information Data33
SDP and CDP Command Objects35
Table 3-20 - SDP and CDP Command Objects35
Exceptions Implementation41
Table 4-1 - Objects for Reporting and Controlling Exceptions42
Table 4-2 - Device Errors43
Table 4-3 - Manufacturer Errors43
Error and Warning Condition Descriptions44
Table 4-4 - Manufacturer Warnings44
Non-Volatile Memory Failures (Display Codes 1,2,3)45
Network Interface Failure (Display Code 4)45
Selected Calibration Invalid (Display Code 5)45
Identity Information Mismatch (Display Code 6)45
Hardware Incompatibility (Display Code 7)46
Flow Sensor Failure & Error (Display Code 10 and 110)46
Flow Sensor Cooling Recovery (Display Code 111)46
Excessive Drift (Display Code 112)46
Process Flow out of Range (Display Codes 115 and 116)46
Table 4-5 - User Specified Flow Limits46
Pressure Sensor Error (Display Code 120)47
Process Pressure out of Range (Display Codes 125 and 126)47
Temperature Sensor Failure & Error (Display Code 130 and 10)47
Table 4-6 - User Specified Pressure Limits47
Temperature out of Range (Display Codes 135 and 136)48
Excessive Leak-By (Display Code 142)48
Control Deviation out of Limits (Display Code 145)48
Table 4-7 - Control Deviation out of Limits48
Temperature Stability (Display Code 230)49
Mounting Orientation Alert (Display Code 251)49
Voltage Input out of Limits (Display Code 260)49
Totalizer Overflow Alert (Display Code 270)49
Warm-Up (Display Code 299)49
Device ID Switch Changed Alert (no Display Code)50
Appendix51
Ramping Feature51
Figure 5-1 - Ramping Feature52

Brooks GF Series - Supplemental Manual

Table of Contents

Other manuals for Brooks GF Series

Related product manuals