Installation and Operation Manual
X-DPT-EtherCAT-GF1XX-MFC-eng
Part Number: 541B219AAG
April, 2017
44
Section 4 - Exceptions Implementation
Brooks EtherCAT MFCs
Sensor Failure (also reported
as Flow Sensor Error)
Flow Sensor Error (also
reported as Sensor Failure)
Flow Sensor Cooling
Recovery
Process Flow Out of Range
High
Process Flow Out of Range
Low
Temperature Sensor Error
(also reported as Sensor
Failure)
* Reserved for future implementation
Table 4-4 – Manufacturer Warnings
Temperature Stability Alert
Mounting Orientation Alert
Voltage Input Out of Limits
Device ID Switch Changed
Alert
4.1. Error and Warning Condition Descriptions
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