2. Quick Start
This section assumes the owner of the device has a fully operational and
trouble-free communications network with appropriate power supplies. This
section also assumes that an EtherCAT master application is connected to
the network capable of PDO and mailbox data communication. Both types of
data communication modes are supported by the Brooks GF EtherCAT
device.
Brooks® GF Series Mass Flow Controllers and Meters conform to the
ETG.5003 Semiconductor Device Profile specification. This specification
consists of two parts:
Part 1: Common Device Profile
The Common Device Profile (CDP) specifies requirements applicable to all
devices described in the Specific Device Profiles. Furthermore, it describes
features and functionalities which shall be further defined in the Specific
Device Profiles.
Part 2xxx: Specific Device Profiles
The Specific Device Profile (SDP) is based on Part 1 (CDP) and defines the
data structure of the specific devices. The Brooks GF1XX Series
implementation of the Semi EtherCAT SDP conforms to ETG.5003.202x.
For a complete specification of a device used in the semiconductor
manufacturing industry a SDP shall be read complementary with the CDP.
Users may obtain a copy of the EtherCAT specifications at
(www.ethercat.org).
2.1. Master Hardware
Various companies provide EtherCAT master applications, e.g. TwinCAT
from Beckhoff, or offer EtherCAT master stacks to develop a master
application, e.g. Acontis. A PC can be used to run most EtherCAT master
applications but needs dedicated Ethernet hardware to support the high cycle
times and kernel mode operation of the master application, see
(www.beckhoff.com).
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