Installation and Operation Manual
X-DPT-EtherCAT-GF1XX-MFC-eng
Part Number: 541B219AAG
April, 2017
25
Section 3 - Slave Configuration
Brooks EtherCAT MFCs
Units: COUNTS(-32768 to
+32767, 24576=100%FS)
Sensor:
Temperature
(integer)
Current Temperature Reading
Units: COUNTS(-32768 to
+32767, 24576=100%FS)
This is the read back of the
Set point sent to the actuator.
(e.g. valve voltage)
True if any command service
has been started and currently
active
True if invalid input in RxPDO
True if ramp has started and
currently active
Valve Control
Mode (fully-
open)
True if device mode is set to
fully-open
Valve Control
Mode (fully-
closed)
True if device mode is set to
fully-closed
3.5.2. Output Data
Table 3-12 ā Output Data
Device Profile(s)
Supported
Controller: Flow
SP (floating)
Sets MFC Flow Set point.
Note: If this parameter is
mapped in PDO, the "Flow
SP [INT]" is excluded from
PDO mapping.
Units: Per Flow Data Unit
Controller: Flow
SP (integer)
Sets MFC Flow Set point
Note: If this parameter is