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Brooks GF Series Supplemental Manual

Brooks GF Series
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Installation and Operation Manual
X-DPT-EtherCAT-GF1XX-MFC-eng
Part Number: 541B219AAG
April, 2017
26
Section 3 Slave Information
Brooks EtherCAT MFCs
mapped in PDO, the "Flow
SP [REAL]" shall be
excluded from PDO mapping.
Units: COUNTS(-32768 to
+32767, 24576=100%FS)
0x7008
Controller:
Ramp Time
MFC, EMFC
0x01
UDINT
WRITE_OP
RxPDO
Ramp Time
See Appendix A for a
description of the Ramp
Feature. Min ramp
time=100ms
Units: milliseconds
MFC, EMFC
0x7009
Actuator
MFC, EMFC
0x01
USINT
WRITE_OP
RxPDO
Actuator Control
0: Feedback (default)
1: Reserved
2: Fully Open
3: Fully Close
4: Freeze Position
MFC, EMFC
0x700F
Status
All
3.5.3. Configuration Data
Table 3-13 Configuration Data
Index
Sub
Index
Data
Type
Access
Name
Description
Device
Profile(s)
Supported
0x8000
Sensor: Flow
(floating)
All
0x01
UDINT
RW
Flow Data Unit
Data Unit for Flow Reading
(Ref. ETG.1004)
SCCM= 0x00A00000
SLM= 0x03A00000
This value is non-volatile
All
0x8001
Sensor: Pressure
(floating)
EMFC, EMFM
0x01
UDINT
RW
Pressure Data
Unit
Data Unit for Pressure
Reading (Ref. ETG.1004)
kPa(A)= 0x03220000
psi(A)= 0x00A30000
torr= 0x00A10000
atm= 0x00A20000
BAR= 0x004E0000
mBAR= 0xFD4E0000
EMFC, EMFM

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Brooks GF Series Specifications

General IconGeneral
BrandBrooks
ModelGF Series
CategoryController
LanguageEnglish

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