Installation and Operation Manual
X-DPT-EtherCAT-GF1XX-MFC-eng
Part Number: 541B219AAG
April, 2017
27
Section 3 - Slave Configuration
Brooks EtherCAT MFCs
Pa= 0x00220000
This value is non-volatile
Sensor:
Temperature
(floating)
Data Unit for Temperature
Reading (Ref. ETG.1004)
C= 002D0000
K= 00050000
This value is non-volatile
Maximum Ramp Time per
User Setting
Units: millisec
This value is non-volatile
Specifies the behavior of the
physical actuator while in
safe state.
MFC is in safe state while in
INIT, BOOT, PREOP, or
SAFEOP.
0: Valve unactuated (default)
1: Valve fully actuated
2: Hold last set point (flow or
position)
This value is non-volatile
Active Gas
Calibration Index
Specifies current active gas
calibration, 1-5 == 0x900A-
0x900E
This value is non-volatile
3.5.4. Information Data
Table 3-14 ā Information Data
Device
Profile(s)
Supported
Stores Result of last Zero