Brooks GF Series Supplemental Manual

Installation and Operation Manual
X-DPT-EtherCAT-GF1XX-MFC-eng
Part Number: 541B219AAG
April, 2017
27
Section 3 - Slave Configuration
Brooks EtherCAT MFCs
Pa= 0x00220000
This value is non-volatile
0x8002
Sensor:
Temperature
(floating)
EMFC, EMFM
0x01
UDINT
RW
Temperature
Data Unit
Data Unit for Temperature
Reading (Ref. ETG.1004)
C= 002D0000
K= 00050000
This value is non-volatile
EMFC, EMFM
0x8008
Controller: Ramp
Time
MFC, EMFC
0x01
UDINT
RW
Max Ramp Time
Maximum Ramp Time per
User Setting
Units: millisec
This value is non-volatile
MFC, EMFC
0x8009
Actuator
MFC, EMFC
0x01
USINT
RW
Safe State
Specifies the behavior of the
physical actuator while in
safe state.
MFC is in safe state while in
INIT, BOOT, PREOP, or
SAFEOP.
0: Valve unactuated (default)
1: Valve fully actuated
2: Hold last set point (flow or
position)
This value is non-volatile
MFC, EMFC
0x800A
Active Gas
Calibration Index
All
0x01
USINT
RW
Index
Specifies current active gas
calibration, 1-5 == 0x900A-
0x900E
This value is non-volatile
All
3.5.4. Information Data
Table 3-14 – Information Data
Index
SI
Data
Type
Access
Name
Description
Device
Profile(s)
Supported
0x9000
Sensor: Flow
(floating)
All
0x01
REAL
RO
Flow Reading Zero
Stores Result of last Zero
All

Brooks GF Series Specifications

General

Brand	Brooks
Model	GF Series
Category	Controller
Language	English