Brooks GF Series - Default Chapter; Table of Contents

i
GF Series
Installation and Operation Manual
X-TMF-GF Series-MFC-eng
Part Number: 541B137AAG
March, 2010
Contents
Paragraph Page
Number Number
Section 1 General Information
1-1 Introduction ................................................................................................................................... 1-1
1-2 Intended Use ................................................................................................................................. 1-1
1-3 Product Support References......................................................................................................... 1-1
1-4 Notice and Caution Statements..................................................................................................... 1-2
1-5 Product Warranty .......................................................................................................................... 1-2
1-6 How to Order an GF1xx Device .................................................................................................... 1-2
1-7 Industry Standard References ....................................................................................................... 1-2
1-8 GF1XX Gas Table ......................................................................................................................... 1-2
1-9 Glossary of Terms and Acronyms ................................................................................................. 1-3
1-10 Patents .......................................................................................................................................... 1-4
Section 2 Product Description
2-1 Introduction ................................................................................................................................... 2-1
2-2 General Description ...................................................................................................................... 2-1
2-3 Operating Principles...................................................................................................................... 2-2
2-4 Specifications for GF Series Controller ......................................................................................... 2-3
2-4-1 Specifications for GF120XSD Series Controller ............................................................................ 2-4
2-4-2 Specifications for GF120XSL Series Controller............................................................................. 2-3
2-5 Product Labeling ........................................................................................................................... 2-4
2-6 Mode Code Description................................................................................................................. 2-5
2-7 Standard Features......................................................................................................................... 2-6
2-7-1 Mounting Attitude .......................................................................................................................... 2-6
2-7-2 Factory Setup Conditions .............................................................................................................. 2-6
2-7-3 Calibration Traceability .................................................................................................................. 2-6
2-7-4 Manufacturing Enviroment ............................................................................................................ 2-6
2-7-5 Materials........................................................................................................................................ 2-6
2-7-6 Auto Shut-Off ................................................................................................................................ 2-6
2-7-7 LED Display .................................................................................................................................. 2-7
2-8 Optional Features.......................................................................................................................... 2-8
2-8-1 Control Valve Options.................................................................................................................... 2-8
2-8-2 Flow Direction Option .................................................................................................................... 2-8
2-8-3 Fittings Option ............................................................................................................................... 2-8
2-8-4 I/O Communication ....................................................................................................................... 2-8
2-8-5 Cable Connector Options .............................................................................................................. 2-8
Section 3 Installation Instructions
3-1 Introduction ................................................................................................................................... 3-1
3-2 Flow Controller Installation Arrangement ...................................................................................... 3-1
3-3 Purge the Gas Supply Line Before GF1XX Installation ................................................................. 3-2
3-4 Unpack and Inspect the GF1XX Device ........................................................................................ 3-3
3-5 Position and Mount the GF1XX Device......................................................................................... 3-3
3-6 Perform a Leak Test ...................................................................................................................... 3-5
Section 4 MultiFlo Configurator
4-1 Introduction ................................................................................................................................... 4-1
4-2 MultiFlo Configurator ..................................................................................................................... 4-1
4-3 Configure the Gas and Flow Range .............................................................................................. 4-2