Brooks GF Series - Page 6

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GF Series
Installation and Operation Manual
X-TMF-GF Series-MFC-eng
Part Number: 541B137AAG
March, 2010
Contents
Paragraph Page
Number Number
Section 5 Performance Checks
5-1 Introduction................................................................................................................................... 5-1
5-2 Zeroing Setup Process ................................................................................................................. 5-1
5-3 Zeroing the GF1XX ...................................................................................................................... 5-2
5-3-1 Zeroing the GF1XX Pressure Transdcer from the LCD Display Panel ......................................... 5-2
5-3-2 Zeroing the GF1XX Flow from LCD Display Panel....................................................................... 5-3
Section 6 Maintenance Requirements
6-1 Introduction ................................................................................................................................... 6-1
6-2 Routine Maintenance .................................................................................................................... 6-1
6-3 Factory Calibration and Service .................................................................................................... 6-2
6-4 On-Site Service ............................................................................................................................. 6-2
Section 7 System Troubleshooting
7-1 Introduction ................................................................................................................................... 7-1
7-2 OEM Tool Troubleshooting Checklist ............................................................................................ 7-1
7-3 GF1XX Troubleshooting Guide ..................................................................................................... 7-2
Section 8 GF Series Device Removal and Return Instructions
8-1 Introduction ................................................................................................................................... 8-1
8-2 Purge Gas Lines Before Removing the GF1XX ............................................................................ 8-1
8-3 Remove and Replace the GF1XX ................................................................................................. 8-1
8-4 Package the GF1XX ..................................................................................................................... 8-2
8-5 Return Shipment of the GF1XX ....................................................................................................8-2
Appendix A: Product Description Code
Product Description Code Example ........................................................................................................... A-1
Appendix B: Industry Standard References
Industry Standard References....................................................................................................................B-1
Appendix C: GF Series Gas Table
C-1 GF1XX Gas Table ............................................................................................................................C-1
Appendix D: Misc. Drawings
D-1 Electrical Connections ......................................................................................................................D-1
D-1-1 DeviceNet Connector .....................................................................................................................D-1
D-1-2 Analog/RS485 Connector...............................................................................................................D-2
D-1-3 Analog/RS485 Adapters .................................................................................................................D-3
D-2 Dimensional Drawings......................................................................................................................D-5
Warranty, Local Sales/Service Contact Information....................................................................... Back Cover