Brooks GF Series - Appendix B: Industry Standard References

B-1
GF Series
Installation and Operation Manual
X-TMF-GF Series-MFC-eng
Part Number: 541B137AAG
March, 2010
Appendix B: Industry Standard References
Table B-1 Industry Standard References
Reference Number Reference Description
MIL-STD-810 Method 514.4, Category 1, Transportation Requirement
Method 516.4, Procedure 1, Functional Shock Test Requirement
SEMI E12 Standard temperature and pressure
SEMI E16 Guideline for determining and describing MFC leak rates
SEMI E17 Guideline for MFC transient characteristics tests
SEMI E18 Guideline for temperature specifications of the MFC
SEMI E27 Standard for MFC and MFM linearity
SEMI E28 Guideline for pressure specifications for the MFC
SEMI E52 Practice for referencing gases used in digital MFCs
SEMI E54 Sensor actuator network connections for DeviceNet
SEMI E56 Test method for detemining accuracy, linearity, repeatability, short-term
reproducibility, hystereses of thermal MFCs
SEMI E66 Test method for determining particle contribution by MFCs
SEMI E67 Test method for determining reliabilty of MFCs
SEMI E68 Test method for determining warm-up time of MFCs
SEMI E69 Test method for reproducibilty and zero drift for thermal MFCs
SEMI E80 Test method for determining attitude sensitivity of MFCs
SEMI E16-90 Guidelines for determining and describing mass flow controllers leak rates
SEMI F19 Specification for the finish of the wetted surface of electro polished
216L stainless steel components
SEMI F20 Specifications for 316L stainless steel bar, extruded shapes, plate, and
investment castings for components used in ultra-high purity semi
manufacturing applications
SEMI F36 Guide for dimensions and connections of gas distribution components
SEMI F37 Method for determination of surface roughness parameters for gas
distribution system components
SEMI F44 Guideline for standardization of machined stainless steel weld fittings
SEMI F45 Guideline for standardization of machined stainless steel reducing fittings
SEMI F47 Specifications for semiconductor processing equipment
voltage sag immunity
SEMI S2 Environmental, Health and Safety Guidelines
SEMI S9 Dielectric testing
SEMI S10 Risk assessment
SEMI S12 Decontamination of fielded products