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Brooks GF Series - Section 2 Product Description

Brooks GF Series
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2-1
GF Series
Installation and Operation Manual
X-TMF-GF Series-MFC-eng
Part Number: 541B137AAG
March, 2010
Section 2 Product Descripton
2-1 Introduction
This section provides a general description, operating principles, product
labeling, model code descriptions, and operating features.
2-2 General Description
As shown in Figure 2-1, the GF1XX utilizes the industry standard
IsoSensor™ thermal mass flow sensor and an absolute pressure
transducer within the same MFC enclosure (transducer not included in the
GF100 and GF120). The result is a faster response to setpoint commands
and the elimination of flow variation associated with upstream/downstream
pressure.
The GF1XX is equipped with PTI technology, which reduces the effect of
pressure fluctuations on gas flow. In PTI technology, a signal from an
integrated pressure transducer is combined with the standard thermal
sensor output. The combined signals allow precise and stable flow, even
when the line pressure is fluctuating.
The GF1XX also utilizes MultiFlo
®
technology that allows the user to
configure standard configurations ("SHs") or "blanks" for a variety of pure
gases and mixtures. As a result, MultiFlo
®
technology enables the user to
reduce unique inventory requirements.
Figure 2-1 GF1XX General Description
LED Display
Pressure
Transducer
PID
Control
Valve
Assembly
Downported
Fittings
PC Board
and Cover
Thermal
Sensor

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