Brooks GF Series User Manual

1-4
GF Series
Installation and Operation Manual
X-TMF-GF Series-MFC-eng
Part Number: 541B137AAG
March, 2010
Section 1 Introduction
1-10 Patents
The GF1XX Series High Performance Gas Flow Controller may be
protected by the following US patents and their international filings:
Patent/Pub. No. Title
6343617
System and method of operation of a digital mass flow controller
6389364
System and method for a digital mass flow controller
6425281
Pressure insensitive gas control system
6445980
System and method for a variable gain proportional-integral (PI) controller
6539792
Method and apparatus for balancing resistance
6640822
System and method of operation of a digital mass flow controller
6681787
System and method of operation of a digital mass flow controller
6714878
System and method for a digital mass flow controller
6752166
Method and apparatus for providing a determined ratio of process fluids
6826953
Flow sensor
6845659
Variable resistance sensor with common reference leg
6910381
System and method of operation of an embedded system
for a digital capacitance diaphragm gauge
6941965
Method and apparatus for providing a determined ratio of process fluids
6962164
System and method for a mass flow controller
7043374
Flow sensor signal conversion
7073392
Methods and apparatus for pressure compensation in a mass flow controller
7082824
Variable resistance sensor with common reference leg
7113895
System and method for filtering output in mass flow controllers and mass flow meters
7114511
System and method for a mass flow controller
7133785
Valve control system and method
7143774
Method and apparatus for providing a determined ratio of process fluids
7150201
System and method for measuring flow
7216019
Method and system for a mass flow controller with reduced pressure sensitivity
7231931
System and method for a mass flow controller
7243035
System and method for mass flow detection device calibration
7272512
Flow sensor signal conversion
7273063
Methods and apparatus for pressure compensation in a mass flow controller
7287434
System and method for measuring flow
7360551
Method and apparatus for providing a determined ratio of process fluids
7363182
System and method for mass flow detection device calibration
7380564
System and method for a mass flow controller
7409871
Mass flow meter or controller with inclination sensor
7412986
Method and system for flow measurement and validation of a mass flow controller
7424894
Method and apparatus for providing a determined ratio of process fluids
7434477
Methods and apparatus for pressure compensation in a mass flow controller

Brooks GF Series Specifications

General

Brand	Brooks
Model	GF Series
Category	Controller
Language	English