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3.2. Making a VSI Measurement of a Step
Figure 3.1: Step Standard
2. Select the arrow on the Open icon then select Vision Recipe (see Figure 3.2). Note that
the default recipe file location is C:\ProgramData\Bruker\Vision\Recipies. If that default
has been changed, you must browse to this directory to find the DemoVSI.visrcp file.
Figure 3.2: Open Recipe
3. Select the DemoVSI.visrcp file and then click OK. This recipe file contains all the settings
that the system will use to measure a 10 µm step.
4. Place the sample on the stage platform.
5. Watching carefully from the side, adjust the z-axis until objective is a few millimeters above
the surface of the step.
6. Raise the z-axis until you find focus (for further instructions, see page 13).
Note You may want to focus on a feature such as the outer edge of the standard
because it’s easier to find focus where there is high contrast.
7. Translate the sample with the x/y stage (see page 13) so at least one edge of the step is visible
in the field of view.
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