Bruker Confidential Information
3
Running the Sample Measurement Recipes
This chapter provides instructions for making two sample measurements — a VSI measurement of
a step (or other tall feature) and a PSI measurement of a mirror. After you have followed these
instructions, you can experiment with other samples and measurement settings and store them in
different recipe files.
To learn how to select your own measurement settings, create new recipe files, apply post-
measurement processing, and change data visualization options, refer to the on-line help.
3.1 About the Example Recipe Files
For the example measurements of the step and mirror outlined in this chapter, you will use previ-
ously created recipe files to obtain your necessary measurement settings. Recipe files store all the
information required to make a specific measurement and to analyze the results. The files you will
use are called DemoVSI.visrcp and DemoPSI.visrcp. For the first few measurements you make,
use the default settings in the recipe file. After you are comfortable with the measurement process,
feel free to change the recipe file name and then adjust the settings to see how various settings will
affect the measurement. For more information, see Chapter 4.
Note If you change the measurement settings and want to save them, always do so in
a recipe file that has a different name than the defaults. That way, when you
want to return to the defaults, you can simply re-open the DemoVSI.visrcp or
DemoPSI.visrcp recipe file.
3.2 Making a VSI Measurement of a Step
Vertical Scanning Interferometry (VSI) is a measurement mode developed at Bruker that enables the
measurement of samples with a considerable height range. While any surface may be measured with
the VSI technique, you may achieve better results on very smooth surfaces with a PSI measurement
(see the next section). For an explanation of how the VSI measurement process works, along with a
description of parts suitable for measurement with the VSI technique, see VSI Measurement Mode
on page 5.
The procedure described in this section guides you through a simple VSI measurement. The
demonstration recipe file provides suitable measurement parameters for a step of approximately 10
µm in height. If you have a calibration standard of this sort (see Figure 3.1) you can use it, but
any similar surface can be substituted.
1. If the system is not running, turn it on and start the Vision64 software (see page 8).
19
To Next Page
Loading...
Need help?
General
