Edwards nEXT200200 - Inlet Screen; Figure 9 Typical Pumping System with a Next Pump

Figure 9 Typical pumping system with a nEXT pump
1. High-vacuum gauge 2. Vacuum system
3. Dierenal apertur
e 4. Foreline trap
5. Backing pump 6. Mist lter
7. Flexible bellows 8. Vacuum gauge
9. nEXT split-ow pump 10. Backing valve
11. WCX water cooler and connecons 12. Air cooler
13. Regulated purge gas supply 14. PRX purge restrictor
15. Vent valve 16. Alternave posion for vent valve
17. Inlet screen 18. Pump main inlet
19. Pump side inlet
1. High-vacuum gauge 2. Vacuum system
3. Dierenal aperture 4. Foreline trap
5. Backing pump 6. Mist lter
7. Flexible bellows 8. Vacuum gauge
9. nEXT split-ow pump 10. Backing valve
11. WCX water cooler and connecons 12. Air cooler
13. Regulated purge gas supply 14. PRX purge restrictor
15. Vent valve 16. Alternave posion for vent valve
17. Inlet screen 18. Pump main inlet
19. Pump side inlet
4.3.1 Inlet screen
WARNING: SHARP EDGES
Risk of injur
y. Trapped O-ring seals with integral inlet screens should be used (as
supplied). Replacement of these seals with alternaves without integral screens will
expose the risk of injury from sharp edges.
Page 34
B85200880_D - Ins
tallaon