Edwards nEXT200200 User Manual

4.3.6 Interstage c
onnecon (variants only)
Use applicable vacuum tube and connectors to connect the interstage port to the
vacuum system or to the outlet ange of the other turbo or compound
turbomolecular pump (if using an 'i' nEXT pump to back other pump). Keep the inlet
strainer in the interstage port only if you are sure that debris cannot enter the interstage
port.
4.4 Purge gas connecon
4.4.1 Recommended purge gas ow
The recommended purge gas ow for typical applicaons is 25 sccm (0.42 mbar l s
-1
,
42 Pa l s
-1
). The ow protects the pump when you pump the oxygen in concentraons
more than 20% by volume.
The ow rate of the purge gas must be in a range given in Purge gas specicaon on
page 23. To limit the ow rate, use a ow controller or a pressure regulator and
calibrated ow restrictor. The PRX10 purge restrictor accessory is applicable for the
purpose. Refer to Accessories on page 92.
4.4.2 Connect the purge gas
Note:
The purge gas must comply with the specicaon given in Purge gas specicaon on
page 23.
1. To supply the purge gas to the pump, remove the plug installed in the purge port.
2. To install a vent port adaptor, refer to Accessories on page 92.
3. Connect the purge gas supply to the vent port adaptor.
4.5 Electrical installaon
WARNING: ELECTRICAL INSTALLATION
Make sure that the electrical installaon of the pump is in accordance with the
regional and local codes and conforms to local and naonal safety requirements. The
pump must be connected to an applicable power supply unit with an applicable earth
(ground) point.
Make sure that the qualied person does the electrical installaon. Do the electrical
connecons of the pump aer the pump is installed on the vacuum system. Disconnect
all electrical connecons from the pump before you remove it from the vacuum system.
Do the grounding of the pump using the given connecon. Refer to Ground the
connecons on page 38.
You can operate the pump using the manufacturer's TIC Turbo Instrument Controller,
TIC Turbo Controller (refer to Connect the logic interface to the TIC on page 38) or using
the customer system. Refer to Connect the logic interface to the customer control
Page 37
B85200880_D - Ins
tallaon

Edwards nEXT200200 Specifications

General

Brand	Edwards
Model	nEXT200200
Category	Water Pump
Language	English