Edwards nEXT200200 - Purge Gas Specification; Figure 6 Max Allowed Rate of Pressure Rise During Venting: Pressure against Time

page 52 f
or the vent opons and the vent valve connecon. Refer to Controlled venng
opons on page 58 for conguring the venng opons.
Table 5 Vent gas specicaon and vent control
Vent gas specicaon and control Reference data
Vent gas Dry air, nitrogen, argon or other inert
gases
Maximum dew point at an atmospheric
pressure
-22 °C
Maximum size of parculates 1 µm
Maximum concentraon of oil 0.1 parts per million
Recommended me for the rotaonal
speed to reach 50%
> 15 seconds
Maximum permied rate of increase of
pressure
Refer to Figure: Maximum allowed rate
of increase in pressure during venng:
pressure against me (pump inially at
full speed) on page 23.
Figure 6 Max allowed rate of pressure rise during v
enng: pressure against me (pump inially at
full speed)
3.4 Purge gas specic
aon
Table 6
Purge gas specicaon
Purge gas specicaon Reference data
Purge gas Dry air, nitrogen, argon or other inert
gases
Maximum dew point at an atmospheric
pressure
-22 °C
Maximum size of parculates 1 µm
Page 23
B85200880_D - Technical data