Edwards nEXT200200 - Parallel, Serial, and Mixed Operation Setup

Note:
R
emove the four rubber feet from the four tapped xing holes before you mount the
base of the pump.
Obey the requirements that follows to make sure that the pump stay secured if the
pump seize:
Support must withstand a destrucve
torque of:
6 KNm
Fixing screws:
8 quanty of M8 to ISO898-1 strength
class 12.9 (nominal tensile strength 1200
MPa)
Screw engagement length: 6 mm minimum
Fastening torque: 15 Nm (1.53 kgf.m)
Use this method for installaon if the pump supports the weight of the vacuum system.
Make sure that the weight of the vacuum system is not more than 20 kg.
4.3.5 Backing port connecon
WARNING: PUMP OVER‑PRE
SSURE
Risk of damage to equipment. To prevent over-pressure in the pump, do not limit the
exhaust line when you vent from a posive pressure gas supply.
CAUTION: BEARING LIFE
Risk of damag
e to equipment. Do not use the pump with a backing pressure less than
5 x 10
-4
mbar (5 x 10
-2
Pa). Lower backing pressures increases the evaporaon rate of
the lubricaon oil and can decrease the life of the bearings.
Note:
Mak
e sure that the ducng is done at the backing line if oil mist or hazardous substances
are available.
Use applicable vacuum tubing and connectors to connect the NW ange of the backing
port to the backing pump. If necessary, use exible pipe or bellows to decrease the
transmission of vibraon from the backing pump to the pump.
We recommend you to use our EM, RV or XDS Scroll backing pump. The recommended
size of backing pump is given in Table: nEXT pumps technical data on page 17. A larger or
smaller backing pump can be used, depending upon the applicaon it is intended for.
The pumps are applicable to use with diaphragm backing pumps but the eect of higher
backing pressure on the pump's performance and cooling requirements must be noted.
Refer to Table: nEXT pumps technical data on page 17 and General technical data on
page 17.
Page 36
B85200880_D - Ins
tallaon