Edwards nEXT200200 - The Pump Is very Noisy or There Is Excessive Vibration or both; No Serial Comms

Remedy Clean the high vacuum system.
Cause Check the system for leaks and c
ontaminaon.
Remedy If a leak is found, repair it and clean the c
ontaminaon.
Cause The inlet pressure is less.
Remedy
• Remove the pump from the system and test the ulma
te pressure of the pump
only.
• Check the pump for contaminaon.
Do the leak test of the pump. If the leak rate more than
1x10
-7
mbar l s
-1
(1x10
-5
Pa l s
-1
), contact us or the supplier.
Fault The pump is very noisy or there is excessive vibr
aon or both
Cause The r
otaonal speed of the pump is same as the resonant frequency of the aached
system.
Remedy Change the natural frequency of the system or isolate the pump using exible bellows.
Cause The vibr
aon is transming from the rotary backing pump.
Remedy Install a exible bellows or a vibraon isolator in the backing line.
Cause The noise is irregular and increasing.
Remedy A de
fecve bearing. Contact us or the supplier.
Cause The pump makes a constant high pitched noise.
Remedy The rotor is out of balance. Contact us or the supplier.
Fault No serial comms
Cause No electrical supply, loss of serial link.
Remedy Check that:
• the electrical supply is on.
• the serial link is connected.
• the serial enable line is acv
e.
Cause Slide switch is not in the correct posion f
or RS232 or RS485.
Remedy Check that:
• the electrical supply is on.
• the serial link is connected.
• the serial enable line is acve.
• Le for RS485, right for RS232.
• Right for parallel control and monitoring.
Cause Incorrect baud rate and node address.
Remedy Check baud rate and, if oper
ang in mul-drop mode, the node address matches those
of the pump.
Cause Check that the red light is not on or ashing.
Remedy If LED is on, check the red alarm LED symptoms.
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B85200880_D - Fault nding