Edwards pXH6000 User Manual

M561-00-880 Issue C
Page 20 © Edwards Limited 2012. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Technical data
2.7 T variants
2.8 Tracer gas analysis
Tracer gas fugitive emission testing was carried out in accordance with the method given in Appendix A2 of SEMI S6
on three different systems, iXH100, iXH1820 and iXH6045H.
Table 15 - Tracer gas test parameters
Table 16 - Tracer gas test system parameters
Table 14 - Heater data
Description Rating Units
Exhaust heater control temperature 160 °C
Exhaust heater power consumption 0.2 kW
Typical booster heater control
temperature
106 °C
Typical booster heater power
consumption
1kW
Test Parameters
Tracer gas SF
6
(Sulphur Hexafluoride)
Tracer gas concentration 100%
Tracer gas release rate 2 slpm
Tracer gas release points Tracer gas flow evenly split between 2 release points
1) exhaust flange on pump
2) exhaust elbow joint within exhaust extraction cover
Process gas Nitrogen
System Parameters iXH100 iXH1820 iXH6045H Units
Extraction flow rate:
From port on top of enclosure
From port on exhaust extraction kit
180
0
180
0
310
60
m
3
/h
Volume of enclosure 0.13 0.24 0.46 m
3
Free volume of enclosure 0.074 0.118 0.229 m
3
Air changes per minute 40.54 25.4 11.2
Hardware configuration:
- 150mm duct connected to port on top of enclosure
- Exhaust extraction cover kit fitted
- 50mm duct connected to exhaust extraction kit


x


x




Edwards pXH6000 Specifications

General

Brand	Edwards
Model	pXH6000
Category	Water Pump
Language	English