Edwards pXH6000 User Manual

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Technical data
M561-00-880 Issue C
Table 17 - Worst case test results
* where Pass indicates acceptable enclosure (satisfies SEMI S2 criteria of less than 25.0% of the TLV)
The pumps tested represent the extremes of the full range of systems. The results in Table 17 are therefore
considered representative across the full range of iXH and iXL systems. Extraction flow rates required for each system
are detailed in Table 18.
Process Gas
Maximum
Gas Flow
(slm)
TLV/LEL
(ppm)
25% TLV/
LEL (ppm)
SF
6
Release
rate (slm)
Max SF
6
Detected
outside
enclosure
ERC
(ppm)
Pass/
Fail *
Chlorine Cl
2
1 0.5 0.125 2 0.079 0.04 Pass
Ammonia NH
3
10 25 6.25 2 0.079 0.40 Pass
Arsine AsH
3
0.1 0.05 0.0125 2 0.079 0.00 Pass
Boron
Trichloride
BCl
3
1 5 1.25 2 0.079 0.04 Pass
Carbon
Monoxide
CO 1 25 6.25 2 0.079 0.04 Pass
Chlorine
Trifluoride
ClF
3
0.5 0.1 0.025 2 0.079 0.02 Pass
DCS SiCl
2
H
2
2 5 1.25 2 0.079 0.08 Pass
Diborane B
2
H
6
0.05 0.1 0.025 2 0.079 0.00 Pass
Fluorine F
2
4.5 1 0.25 2 0.079 0.18 Pass
Hydrogen H
2
150 4000 1000 2 0.079 5.93 Pass
Hydrogen
Chloride
HCl 20 5 1.25 2 0.079 0.79 Pass
Hydrogen
Fluoride
HF 2 3 0.75 2 0.079 0.08 Pass
Nitrogen
Trifluoride
NF
3
10 10 2.5 2 0.079 0.4 Pass
Phosphine PH
3
0.2 0.3 0.075 2 0.079 0.01 Pass
Silane SiH
4
6 5 1.25 2 0.079 0.24 Pass
Sulphur
Hexafluoride
SF
6
2 1000 250 2 0.079 0.08 Pass
TEOS SiC
8
H
20
O
4
2 10 2.5 2 0.079 0.08 Pass
Tungsten
Hexafluoride
WF
6
1 3 0.75 2 0.079 0.04 Pass

Edwards pXH6000 Specifications

General

Brand	Edwards
Model	pXH6000
Category	Water Pump
Language	English