The power to the system must be switched off when the MicroTIM or active accessories module is installed or
removed. If it is not, these modules may be damaged. Refer to the appropriate accessory manual for more
information.
Refer to the individual accessories manuals for information about installation.
The disconnect box, when fitted, is used to energize and isolate the power to the system. It also allows the isolation
of the electrical supply during an emergency and for maintenance and troubleshooting the system, thereby satisfying
SEMI S2 requirements. The photohelic switch / gauge when fitted, allows monitoring for loss of extraction from the
enclosure, thereby satisfying SEMI S2 requirements.
3.12 Commission the system
1. Switch on the external electrical supply and check that the POWER LEDs (Figure 2, item 7 and Figure 4, item 4)
go on. If the LEDs do not go on, contact Edwards.
2. Switch on the cooling-water and nitrogen supplies.
3. Ensure that the exhaust-extraction system is not blocked (for example, that valves in the exhaust-extraction
system are open).
4. Ensure that all openings to atmospheric pressure in the foreline vacuum system are closed.
5. Press the LOCAL CONTROL button (Figure 2, item 5) and check that the green LOCAL CONTROL LED
(Figure 2, item 6) comes on and then remains continuously illuminated.
6. Press START button (Figure 2, item 3)
During some application cycles it is possible that the system may exceed OSHA 1910.95
Occupational Noise Exposure Limits, the EU noise directive 2003/10/EC or other regional noise
limits dependent upon the process, duty cycle, installation or environment in which the pumping
system is being operated. A sound pressure survey must be conducted after installation and, if
necessary, controls implemented to ensure that the relevant limits are not exceeded during
operation and that adequate precautions are taken to prevent personnel from exposure to high
noise levels during operation.
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