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Edwards pXH6000 User Manual

Edwards pXH6000
88 pages
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© Edwards Limited 2012. All rights reserved. Page i
Edwards and the Edwards logo are trademarks of Edwards Limited.
Contents
M561-00-880 Issue C
Contents
Section Page
1 Introduction .......................................................................................1
1.1 Scope and definitions ................................................................................................... 1
1.2 Applications ............................................................................................................... 2
1.3 Description ................................................................................................................ 2
1.4 Priority of control ........................................................................................................ 2
1.5 Active utility control .................................................................................................... 3
2 Technical data ....................................................................................5
2.1 General technical data .................................................................................................. 5
2.2 Performance data ........................................................................................................ 7
2.3 Loading data .............................................................................................................. 8
2.4 Nitrogen purge data ..................................................................................................... 9
2.5 Electrical data ...........................................................................................................11
2.6 Cooling-water data .....................................................................................................17
2.7 T variants ................................................................................................................20
2.8 Tracer gas analysis .....................................................................................................20
3 Installation ....................................................................................... 23
3.1 Locate the dry pumping system ......................................................................................24
3.2 Lubrication ...............................................................................................................25
3.3 Connect the dry pumping system to your vacuum/exhaust system .............................................25
3.4 Connect to your factory extraction system (optional) ............................................................27
3.5 Connect the nitrogen supply ..........................................................................................28
3.5.1 Flammable/pyrophoric materials ....................................................................................28
3.5.2 Gas purges ...............................................................................................................29
3.6 Leak-test the system ...................................................................................................29
3.7 Electrical supply ........................................................................................................29
3.7.1 Mains supply cable connection .......................................................................................31
3.8 Connect an additional RF earth (ground) (optional) ..............................................................35
3.9 Connect to your emergency stop circuit ............................................................................35
3.10 Connect and set up the cooling-water ..............................................................................36
3.11 Accessories ...............................................................................................................37
3.12 Commission the system ................................................................................................37
3.13 Install additional safety equipment ..................................................................................38
4 Operation ........................................................................................ 39
4.1 Start-up ..................................................................................................................39
4.1.1 MicroTIM operation .....................................................................................................40
4.1.2 PDT operation ...........................................................................................................40
4.1.3 Front panel control operation ........................................................................................40
4.2 Status indicators ........................................................................................................40
4.3 Manual shut-down ......................................................................................................41
4.3.1 Shut-down modes .......................................................................................................41
4.3.2 MicroTIM operation .....................................................................................................41
4.3.3 PDT operation ...........................................................................................................41
4.3.4 Front panel control operation ........................................................................................41
4.4 Automatic shut-down ..................................................................................................42
4.5 Unplanned shut-down and alarms ....................................................................................43
4.6 Emergency stop .........................................................................................................44
4.7 Restart the pump after an emergency stop or automatic shut-down ..........................................44
4.8 Advanced control and monitoring ....................................................................................44
gea/0179/01/12

Table of Contents

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Edwards pXH6000 Specifications

General IconGeneral
BrandEdwards
ModelpXH6000
CategoryWater Pump
LanguageEnglish

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