ferrotec Temescal CV-6SLX User Manual

Section 5: Troubleshooting 5.4 Troubleshooting Procedures
0101-8242-0, Rev. C 5-17 CV-6SLX User Manual
Table 5-2 One or More Interlocks Not Made
Symptoms
• TCS displays PSU1_RDY_ALM ( = Power Supply Control Not Ready Timeout Alarm)
• HVPS Front Panel: INTERLOCKS OK and POWER SUPPLY FAULT LEDs light red
• EBC issues one of the following alarms: Aux Connect Water Supply Interlock Alarm, Aux Connect Aux
Interlock Alarm, Aux Connect Vacuum Interlock Alarm, Aux Connect Tank Interlock Alarm. In
addition, one of the LEDs in the High Voltage/Gun Interlocks section of the Diagnostics screen is unlit.
For additional information about this fault mode, see Ishikawa Diagram #2.
Possible Causes Procedure
1. Interlock indicated by EBC is not made.
1. Troubleshoot the external indicated external interlock(s) (i.e., Tank (=
vacuum cubicle doors), Vacuum, Auxiliary, Water, Position.
2. Top-cover interlock switch on either
HVPS or FPS is not made.
2. First make sure that the top covers of the HVPS and the FPS are secured
properly in place. If so, make sure that the HVPS-FPS cable (PN 0620-6672-
0) is securely connected to HVPS rear-panel connector J5 and to FPS
connector J102
3. Fault condition(s) whose investigation
requires removal of HVPS top cover..
3. Contact Temescal Field Service.
Table 5-3 General Condition: HVPS Powered Up But Fails to Achieve HV Ready State
Symptoms
• TCS displays PSU1_RDY_ALM ( = Power Supply Control Not Ready Timeout Alarm)
• EBC issues HVPS Not Ready Timeout alarm
Possible Causes Procedure
1. On systems equipped with a Temescal
PopTop e-beam gun, the crucible cover is
not in the Down position.
1. Verify that cover is physically in the Down position and that the gun’s Down
position switch is correctly adjusted.
2. Confirm that the HVPS front-panel
POWER ON LED is lit and that all HV
and gun interlocks are made.
2. Check interlock string (see Table 5-2).
3. Faulty or loose connection(s) at one
end of the HV Control-Vacuum System
I/O cable (PN 0620-9840-0).
3. Verify that cable is securely connected to HVPS J4 and to connectors HVJ1
and HVJ2 on the remote controller rear panel.
4. An externally supplied HV READY
signal is not high.
4. Troubleshoot the vacuum system end of the HV IS READY loop.
5. Fault condition(s) whose investigation
requires removal of HVPS top cover..
5. Contact Temescal Field Service.

ferrotec Temescal CV-6SLX Specifications

General

Brand	ferrotec
Model	Temescal CV-6SLX
Category	Power Supply
Language	English