Section 5: Troubleshooting 5.4 Troubleshooting Procedures
0101-8242-0, Rev. C 5-21 CV-6SLX User Manual
4. If the symptom is not in evidence during Step 3, troubleshoot the HV path and emitter assembly, following the instructions
in the e-gun manual. If the symptom persists during Step 3, reconnect the HV output cable to J101, switch the power
supply back on, and proceed with the troubleshooting steps described below.
5. Fault conditions whose investigation
requires removal of HVPS top cover.
5. Contact Temescal Field Service.
DANGER: HIGH VOLTAGE
Before performing any of the procedures described on this page, perform the
procedure described in section 5.4.1.
Table 5-10 Filament Current Out Of Regulation
Symptom: When gun and HV are switched on, filament current ramps up and goes out of regulation
Possible Causes Procedure
1. Faulty or loose connections. 1. Make sure that all HV and FPS connections are correctly and securely made.
2. Short in HV path 2. Check emitter, feethroughs, and cables for signs of shorts.
3. Emitter damaged 3. Follow instructions in gun manual to troubleshoot emitter issues.
4. Fault conditions whose investigation
requires removal of FPS top cover.
4. Contact Temescal Field Service.
Table 5-11 HVPS ARC/OUT OF REGULATION LED Flashes Excessively
Condition indicated: Subthreshold arcing is occurring and/or HV is intermittently out of regulation
NOTE: A problem exists only if arcing is excessive for the material or process in question
Symptoms:
• HVPS front panel: The ARC/OUT OF REGULATION LED flashes excessively. The HV OUT OF REGULATION
LED turns yellow for 2 seconds each time the ARC/OUT OF REGULATION LED flashes
For additional information about this fault mode, see Ishikawa Diagram #6 in Appendix A.
Possible Cause Procedure
1. Emitter damaged 1. Follow instructions in gun manual to troubleshoot emitter issues.
2. Faulty or loose connections. 2. Make sure that all HV and FPS connections are correctly and securely made.
3. HV feedthrough shorted
3. Check copper bus bars and HV feedthroughs for shorts, coatings, cracks or
arc marks
4. Chamber Pressure too high 4. Chamber pressure should be less than 1 x 10
mTorr.
5. System improperly grounded for HV. 5. Follow grounding instructions provided in e-gun manual.
6. Incorrect or fluctuating line voltage 6. Confirm input line voltage
7. Fault conditions whose investigation
requires removal of HVPS top cover.
7. Contact Temescal Field Service.
To Next Page
Loading...
Need help?
General
