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13. Cleanroom Specification
13.1 Suction Rate
Air inside the actuator must be suctioned to ensure that the actuator operates in conformance with the
requirements of cleanliness class 10.
Provide an air tube and connect it to a quick joint (outer diameter
6) provided at the suction section, and
connect the other end of the tube to a vacuum pump, blower, ejector, etc., to suction at an applicable flow
rate as specified below.
Lead Recommended suction rate
2.5 mm/3 mm 15 NI/min
5 mm/6 mm 30 NI/min
10 mm/12 mm/16 mm 50 NI/min
10 mm (SS8) 40 NI/min
20 mm 80 NI/min
13.2 Suction Joint
Remove the plug from either quick joint and insert an air tube to suction air from either the motor side or
counter-motor side.
Remember to cover the unused joint with a plug.
Plug
Quick joint
Quick joint
SA4, SA5, SA6 Outer diameter 6
SA7 SS7 Outer diameter 8
SS8 Outer diameter 12
Air tube (provided by the customer)
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