tinb29e1-c (2019-10) VGC083A_B.om 75
Table "INFICON RS232 and RS485 Command Protocol Summary" (continued)
SET EMISSION
Current
Choose 10 mA, 4mA or
100uA emission current
#xxSEy<CR>
e.g.: #01SE1<CR>
where, y=1=4mA; y=0=100μ
A
xx_PROGM_OK<CR>
When in Auto I
e
mode:
?01_INVALID_<CR>
SET FILAMENT Choose Filament 1 or 2 #xxSFy<CR>
e.g.: #01SF1<CR>
where, y=1 for F1; y=2 for F2
*xx_PROGM_OK<CR>
Read EMISSION
Current
Read emission current
setting
#xxSES<CR>
e.g.: #01SES<CR>
*xx_0.1MA_EM<CR>
*xx_4.0MA_EM<CR>
READ IG STATUS Finds out the cause of the
specified device inactive
reading
#xxRSIG<CR>
e.g.: #01RSIG<CR>
When IG or device is not
connected, response is:
?01_INVALID_<CR>
*xx_00_ST_OK (IG status is OK)
*xx_01_OVPRS (overpressure-
system pressure is too high)
*xx_02_EMISS (Ie control fail)
*xx_04_ FLVLO (low filament
voltage condition)
*xx_08_ FLOPN (selected
filament is open circuit)
*xx_10_ DEGAS (IG is in DEGAS
mode of operation)
*xx_20_ ICLOW (IG collector
current is below normal range)
*xx_40_ FLIHI (filament drive
current is too high)
READ SW VERSION Read the part number and
revision number (version) of
#xxVER<CR>
e.g.: #01VER<CR>
*xx_mmmmm-vv
e.g., : *01_01306-11 <CR>
SET CGn ZERO Set the zero or vacuum
calibration point for CGn
#xxTZCGn <CR>
e.g.: #01TZCG1_0<CR>
e.g.: #01TZCG2_1.23E-02
<CR>
where,
n=1 or 2 (for, CG1 or CG2)
y.yy = mantissa,
z = sign of the exponent +/- and
*xx_PROGM_OK<CR>
When P > 100 mTorr:
?01_INVALID_<CR>
When CG is not connected:
?01_INVALID_<CR>
When requested gauge number
<1 or >2:
?01_SYNTX_ER <CR>
SET CGn SPAN Set the span or atmosphere
calibration point for CGn
#xxTSCGn_y.yyEzpp<CR>
e.g.: #01TSCG1_
7.60E+02<CR>
where,
n=1 or 2 (for, CG1 or CG2)
y.yy = mantissa,
z = sign of the exponent +/- and
pp = the exponent
*xx_PROGM_OK<CR>
When P < 400 Torr:
?01_INVALID_<CR>
When requested P < 400Torr:
?01_INVALID_<CR>
When requested P > 1000mT:
?01_INVALID_<CR>
When CG is not connected:
?01_INVALID_<CR> When
requested gauge number <1 or
>2: