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Inficon XL3000flexRC - Page 62

Inficon XL3000flexRC
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6 | Operation INFICON
62 / 108 XL3000flex-Operating-instructions-jina83en1-07-(2105)
ASCII protocol Command *CONFig:CALleak:EXTSniff (for current mass in
device selected unit)
► LD and ASCII protocol: The status must be queried via: Command 260 or
*STATus:CAL
1
Start calibration.
2
Wait until leak rate signal is tuned and stable.
3
Start calibration:
Control unit: Features > CAL > Extern
LD protocol: 4, Parameter 1
ASCII protocol: *CAL:EXT
IO1000: see the figure below.
ð Request to "close calibration leak"
4
Sniffer mode: Remove sniffer line from calibration leak.
ð Leak rate signal decreases.
5
Confirm measured background value is stable:
Control unit: "OK"
LD protocol: 11, Parameter 1
ASCII protocol: *CAL:CLOSED
IO1000 see the figure below.
ð Calibration is completed if:
Control unit: Old and new calibration factor are displayed
LD protocol LD instruction 260 provides 0 (READY)
ASCII protocol: Command *STATus:CAL? provides IDLE
IO1000 see the figure below.

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