Inficon XL3000flexRC - Page 84

7 | Warning and error messages INFICON
84 / 108 XL3000flex-Operating-instructions-jina83en1-07-(2105)
Warning
(Wrn)
Error (Err)
Error message
LDS3000
Error number Limit values Cause
LDS1000
Protocol
Binary or
ASCII
protocol
compatibilit
y mode
LDS1000/
LDS2010
Wrn421 TMP voltage too low Cable cross-section 24 V supply
for MSB modules too low, output
current 24-V power supply too low
(I <10 A), power supply defective,
TMP defective
Err422 TMP no run-up time 49 2 8 min. TMP foreline pressure too high,
VV pump final pressure too high,
leakage high vacuum system,
flood valve not close, TMP bearing
damage, TMP flawed
Err423 TMP pressure rise 49 2 Inrush of air, flood valve defective
or incorrectly dimensioned
5xx Pressure and flow errors
Wrn500 Pressure sensor not
connected
58 144 0.5V Pressure sensor PSG500 P1 not
connected, IF board or MSB
defective
Wrn502 Pressure sensor 2 not
connected
Pressure sensor PSG500 P2 not
connected, IF board or MSB
defective.
Wrn520 Pressure too high 73 148 18 mbar Pressure p1 too high
Wrn521 Pressure rise, anode
voltage collapse
73 148 < Setpoint
- 20V
Pressure p1 too high, message
after 1.4s
Wrn522 Pressure rise, emission
collapsed
73 148 < 90% of
the target
value
> 110% of
the target
value
Emission was stable previously,
pressure p1 too high, message
after 5s
Wrn540 Pressure too low, Sniffer
blocked
63 62 Sniffer flow
warning
parameter
Sniffer clogged, sniffer valve
defective,filter clogged