8-1
8
Air Piping Diagram
8-1. List of air components
Place in which the part is used
Shuttle R-side pad selection
Shuttle L-side pad selection
Y-axis tray chuck section
Shutter broadening/narrowing
Ultra-compact air cylinder
Ultra-compact air cylinder
Y-axis tray chuck section
Shutter broadening/narrowing
24 40045177
Slow mode (HR UP)
Optional: slow 2 mode
Head R-side UP
25 40045179
Slow mode (HR DOWN)
Optional: slow 2 mode
Head R-side DOWN
26 40045181
Slow mode (HL UP)
Optional: slow 2 mode
Head L-side UP
27 40045183
Slow mode (HL DOWN)
cable 2 ASM
Head L-side DOWN
28 40045187
Slow mode (tray)
cable 2 ASM
Y-axis tray chuck section
29 40045185
Slow mode (SHT)
cable 2 ASM
Shutter narrowing side