MKS 250E - Mounting Instructions; Table 3: Control Valves

Setup Cha
p
ter Two: Installation
16
Mounting Instructions
Controller
The 250 can be mounted on any instrument panel or placed on a bench. The mounting position
is not critical and it will operate properly in any position. While the unit is designed and tested
to operate with no air circulation, it will run much cooler if the top air slots are clear to allow
convection air circulation. No special precautions are needed to protect the unit from ordinary
mechanical shock and vibration. A rack mounting kit (RM-6) is available from MKS for single
or dual unit rack mounting.
Valve
The 250 unit can control a variety of valves, as listed in Table 3. The control valve should be
connected to the 250 controller using piping or hose as large in diameter and as short in length as
possible. The valve can be changed at any time as long as the proper cable is used. Refer to the
appropriate manual for mounting instructions.
Control Valves
Type of
Valve
Manufacturer Manufacturer
Part Number
MKS Part
Number
Flow Range
(sccm)
Connection
Cable or
Connector
Piezoelectric Veeco PV-10 170M-49 0 - 200 Consult
factory
Solenoid MKS 148, 148J,
154, 248
148, 148J,
154, 248
0 - 10 to
0 - 50K
CB-251-2-10
Solenoid Brooks 5835A 251-xx 0 - 50K Consult
factory
Solenoid Balzers RME010 255 0 - 40K Consult
factory
Table 3: Control Valves