OM-610-1002-1 Operator’s Manual Rev 37
PDS-2010 SECTION 1 SAFETY page 3
glasses, gloves, and a dust half-mask for handling and shipping activities. This will provide protection in
case the rigid skin is breached and the interior material becomes airborne.
If any of the material, most likely next to the heating elements, reaches 1000°C, a chemical change takes
place that forms cristobalite. This material can cause a respiratory disease called silicosis. Again, the risk
of dust exposure to the customer is minute under normal operation, because normal furnace operating
temperature is substantially lower than 1000°C.
1.3 DIMER LOADING DOOR
The loading door heating element is controlled as a part of the vaporizer. A metal shield covers the heating
element to protect against electric shock. When the vaporizer is enabled, this shield becomes hot. This part of
the coating unit should not be touched during heat-up, deposition, or cool down after a coating cycle. Wear
protective gloves if it becomes necessary to open the loading door when the door is hot.
1.4 DEPOSITION CHAMBER VACUUM SENSOR
The chamber vacuum sensor must be heated to prevent deposition of Parylene on the sensing elements. Wear
protective gloves if it becomes necessary to handle the heating element or the sensor itself when they are hot.
1.5 INLET BAFFLE
Wear protective gloves when removing the inlet baffle from the deposition chamber after a coating run. This
baffle may become heated to temperatures in excess of 200°C via radiation from the pyrolysis furnace during
deposition.
1.6 GLASS VIEWPORTS
Glass viewport(s) are provided to allow viewing of the substrate and fixturing during the coating process. A
viewport that is damaged or improperly installed poses a potential implosion threat while the chamber is under
vacuum. Such an implosion would likely damage the substrate and/or the coating equipment, and could
possibly cause personal injury.
CAUTION: Do not operate the 2010 if one of the viewports is cracked or improperly
installed. Avoid impacts to the viewport surfaces while the system is under vacuum.
Follow the Serial Number Label for voltage, frequency, phase, and current requirements. See the
schematic for proper connections. When connecting power, supply a secure and adequate ground. Failure
to do so creates a potential electrical shock hazard.
If any Safety Labels are damaged, defaced, removed, or are otherwise unreadable, replace the labels.
CAUTION: The 2010 is available with an optional mechanical chiller unit. The surface of
the probe with this configuration can reach temperatures below negative 120°C. Exercise
caution to avoid direct skin contact with the probe of a mechanical chiller cold trap when it
is cold.
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