OM-610-1002-1 Operator’s Manual Rev 37
PDS-2010 SECTION 5 OPERATION page 21
Figure 5: Control Panel
5.3.2.5 Typical Process Settings (many factors affect this; yours may be different)
Parylene Vapor Heater. Set Point Pressure Set Point Pyrolysis Heater Set Point
Type N 160 C Base + 55 Vacuum
Units
650 C
Type C 175 C Base +15 Vacuum
Units
690 C
The quality of the deposition depends heavily on the rate of deposition. Lower pressure or lower
vaporization temperature will slow the deposition rate and result in better distribution and better quality of
film.
In some applications, the initial rise or overshoot in chamber pressure may be unacceptable. In these
instances, the overshoot can be reduced or eliminated by utilizing the lower set point on the vaporizer
temperature controller (PhA2). It can also be accomplished by starting the vaporizer heater at a lower set
point. If initial overshoot is a problem, start the lower set point, or it can be done manually by starting the
vaporizer heater controller with a set point of 110-120 C. If you are using the lower set point, the
vaporizer will automatically heat to its final set point after a 30-minute dwell time. If manually changing
the set point after the chamber pressure has stabilized at its set point, raise the vaporizer heater set point to
its final temperature of 175°C for Parylene C or 160°C for Parylene N.
5.4 CONTROL PANEL
This section explains the function and operation of control panel components.
Emergency Stop
Emergency Stop is a rotary type pushbutton. Depressing the Emergency Stop will remove power from the
machine, except for F1, F2, Main Power Pushbutton Light, Motor Starter Contacts, EMO, and CR7 Contacts.
Rotate the Emergency Stop clockwise to release.
6100+ 6100+ 6100+
6100+
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