SCS LABCOTER 2 - Cold Trap Operation; Mechanical Chiller (Option); LN (Option)

Rev 37 Operator’s Manual OM-610-1002-1
page 26 SECTION 5 OPERATION PDS-2010
5.8 COLD TRAP OPERATION
CAUTION: Operation of cryogenic devices poses the threat of severe freeze injury.
5.8.1 Mechanical Chiller (option)
The 2010 is equipped with a mechanical chilling unit; this includes a cold trap probe that is inserted into the
cold trap housing. For operation of this unit, follow the manufacturer's instructions.
IMPORTANT: The mechanical chiller is equipped with a "T" type thermocouple that
measures the temperature of the probe. This thermocouple may be used to monitor the cold
trap temperature during a coating cycle. If this temperature is being monitored, the
vaporizer heaters should not be enabled until the cold trap probe is below -75°C. If this
temperature is not being monitored, the mechanical chiller should be allowed to operate for
at least 45 minutes before initiating the vaporizer heaters. This is done to make sure that
the cold trap is cold enough to adequately capture Parylene process by-products so the
vacuum pump is protected.
5.8.2 LN
2
(option)
Outside the European Community, the 2010 may be equipped with a LN
2
(Liquid Nitrogen) chilling unit; this
includes a cold trap probe that is inserted into the cold trap housing. The option consists of an electronic
control card, sensors, solenoid valve, cable, and a fitting for connecting the supply of LN
2
to the 2010. A
LN
2
supply regulated at 20-25 PSIG is recommended for auto control of the LN
2
into the cold trap probe.
The Auto LN
2
low level-sensor opens the solenoid valve to allow LN
2
to flow into the probe. When the
LN
2
level reaches the high level-sensor, the solenoid valve is closed. As the LN
2
evaporates, the level
drops once again to activate the low level-sensor. This cycle will continue throughout the coating run. The
LN
2
solenoid is enabled when the vacuum switch is in the VACUUM position. This allows the cold trap probe
to be chilled to –196°C
almost immediately.
WARNING: Industrial safety rules require the wearing of both safety glasses and
protective gloves when working with or handling liquid nitrogen. Adhere to these rules
at all times when working in the vicinity of the liquid nitrogen cold trap and control
elements. Keep face and hands clear of the discharge area. Wear protective gloves when
removing the cold trap probe for cleaning after a deposition cycle has been completed.
Use the handles of the cold trap probe when removing the probe from the cold trap
housing. Do not touch the probe surface with any exposed skin; doing so will
immediately freeze unprotected areas, causing serious frostbite injury.
WARNING: In addition to the frostbite potential, use of liquid nitrogen will
release gaseous nitrogen into the atmosphere in the equipment area. Nitrogen
is non-toxic, but can cause rapid asphyxiation in a confined area that does
not provide adequate ventilation. Keep the 2010 equipment area well
ventilated during cold trap operation.