Rev 37 Operator’s Manual OM-610-1002-1
page 56 SECTION 6 MAINTENANCE PDS-2010
PERIODIC MAINTENANCE LOG
Date Daily Maint.
Items
Pyrolysis Tube Dimer Boat Tubing Temperature
Pressure
Readouts
PUMP
OIL
Scrape/Peel
Build-up at Ends
Replace Inspect. Replace
as Needed
Verify.
Calibrate as
Needed
CHANGE
6.6 SUPPLIES FOR SERVICING
Lint Free Paper Towels Spray Bottle for Micro-Soap Allen Wrench Set
Scotch Brite
TM
2% Micro-Soap/Water Solution Pliers
Single Edge Razor Blades Hi-Temperature O-Ring Grease Tweezers
Screwdrivers Non-Flammable Solvent Flash Light
SA-285-1119-1
2010 Rotary Feed Thru Rebuild Kit
SA-285-1216-1
2010 Cleaning Kit
6.7 COATING PROBLEMS AND SOLUTIONS
The following table lists Parylene coating problems and solutions. The solutions offered are general
guidelines and should resolve most problems.
Each specific coating application will have its own requirements for coating thickness, substrate
configuration in the Chamber, rate of deposition, and other criteria. The customer must optimize the
process for each coating application.
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