Rev 37 Operator’s Manual OM-610-1002-1
page 44 SECTION 6 MAINTENANCE PDS-2010
6.3.5 Vacuum Amplifier Circuit Board Calibration
To locate the vacuum amplifier circuit board, remove the left side panel from the machine. The circuit board is
located inside the frame of the 2010, below the fuse blocks.
The vacuum zero adjust setting (labeled "VAC") for the amplifier circuit board is of primary concern for
proper operation of the 2010. The atmospheric setting (ATM) has little effect on the calibration of the sensor
in the vacuum range utilized during the Parylene deposition process.
6.3.5.1 Vacuum Zero Adjust (VAC)
1. Rem
ove all power and remove the cabinet side panels
2. Remove the blue circular connector from the gauge tube and install the Convectron Zero Pressure
Simulator.
3. Turn on the Main Power.
4. View the process value set point on the vacuum controller display.
5. Locate the vacuum potentiometer (labeled "VAC") on the amplifier circuit board.
6. Press and hold the red button at the end of the zero pressure simulator. Adjust the VAC potentiometer
to achieve a reading of "-4" on the display. (Turning the potentiometer clockwise will raise the
displayed value, and turning it counterclockwise will lower it.)
7. The zero adjust calibration is now complete. Turn off the Main Power, reconnect the gauge tube
cable, re-install the side panels, and then turn the Main Power on again.
6.3.5.2 Atmosphere Adjust (ATM)
1. Assure that the cham
ber is at atmospheric pressure by removing the cold trap probe or the chamber
lid. The chamber gauge tube should be at room temperature.
2. View the process value set point on the vacuum controller display.
3. Locate the atmospheric potentiometer (labeled "ATM") on the amplifier circuit board.
4. Adjust the ATM potentiometer to achieve a reading of "1000" on the display. (Turning the
potentiometer clockwise will raise the displayed value, and turning counterclockwise will lower it.)
NOTE 1: The value of "1000" correlates to a standard atmosphere, defined as 29.92 inches of mercury, or
760 Torr. For the most accurate calibration, a barometer could be used to determine exact atmospheric
conditions at the time of calibration. Then the corresponding atmospheric reading could be calculated. For
the purposes of calibrating the 2010, this is not required.
NOTE 2: The amplifier circuit board should be re-calibrated any time the pressure gauge tube is replaced.
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