OM-610-1002-1 Operator’s Manual Rev 37
PDS-2010 SECTION 6 MAINTENANCE page 37
SECTION 6 MAINTENANCE
6.1 PARYLENE DEPOSIT REMOVAL
The nature of the Parylene coating process necessitates the periodic removal of the Parylene that is deposited
on the interior surfaces of the coating chamber and related components.
6.1.1 Applying Release Agent
To aid the removal of the deposited film it is imperative that a release agent be applied to all surfaces that will
be coated and subsequently stripped. A 2% mixture of "Micro® Laboratory Cleaning Solution" (manufactured
by International Product Corp.) with deionized water is an effective release agent. Application is most
effectively performed with a spray bottle and a lint-free cloth. Components for application include:
• interior of coating chamber and base
• inlet baffle
• cold trap probe and housing
• piping between coating chamber and cold trap
• any other items that appear in the coating chamber that will be stripped of film (reusable fixturing,
witness strips, etc.)
Once Parylene has been deposited, a Micro® soap interface between the Parylene film and the coating
chamber interior has been established. This Micro® soap interface will remain until the Parylene film has
been removed. It is not necessary to apply the release agent to the Parylene film itself, but only to the bare,
uncoated surfaces that will receive a coating during the first deposition cycle after cleaning.
6.1.2 Parylene Coating Removal
The following items should be cleaned when the coating becomes excessively heavy, blisters, or separates
from the surfaces:
• Deposition Chamber
• Viewing Port
• Inlet Baffle
• Chamber Ports, inlet, and exit
• Cold Trap Housing internal surfaces
Parylene deposits thicker than .001 inch on the chamber interior walls, base, and baffle should be stripped.
NOTE: Avoid using sharp tools for removing deposits, or use extreme care; you could be injured and could
nick the surfaces. Such nicks could make it more difficult to remove deposits the next time and damage the
sealing surfaces, causing leaks.
Do not attempt to remove very thin coatings, as they tend to break during removal. However, sections of
coating that pull away from the surfaces can cause problems if they are not removed. The main problem which
can occur is collapsing (or pulling completely away) of the coating when the system has been loaded for a run.
When the system is placed under vacuum, air entrapped under the coating will migrate, possibly pulling the
coating away completely. If this happens in the deposition chamber, the coating will surround the fixture,
preventing the dimer from depositing properly. If this happens in the pump out port, the collapsed coating
could reduce or eliminate the vacuum needed to achieve an acceptable quality coating.
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