Rev 37 Operator’s Manual OM-610-1002-1
page 28 SECTION 5 OPERATION PDS-2010
Figure 7: Pressure Diagram
5.10 BASE PRESSURE
The base pressure for the 2010 is defined as the lowest obtainable pressure reading (under the specific
conditions described in the next section, as indicated by the vacuum gauge). It is imperative for efficient and
quality deposition that you know the base pressure, and check it frequently. The base pressure reading is
repeatable—significant deviation from previously established readings (more than 3 vacuum units) can
indicate vacuum leaks, vacuum pump problems, calibration errors, and other deficiencies that degrade system
performance.
A base pressure check is recommended:
• before the first coating run with a new machine.
• after extended periods of non-use.
• after every 5 to 10 coating cycles during regular use.
• as warranted by changes in coating quality.
Determining Base Pressure
The following procedure should be used to check the base pressure of an unloaded 2010 sy
stem (clean, dry,
empty chamber).
1. Make sure all vacuum system O-rings and gaskets, and their mating surfaces, are clean and free of
Parylene film.
2. Lower the chamber over the base (it is not necessary to install the baffle into the chamber inlet), insert the
cold trap probe into the housing, turn on mechanical chiller or LN2, close and seal the vaporizer load
door.
NOTE: If the unit is equipped with a LN
2
Chiller, it will come on in Step 6.
3. Press the Main Power pushbutton. The computer will initialize and the process controllers will illuminate.
4. Verify that the process controller set points are at their normal operating values (see Section 6.4.5 for
factory settings and Section 6.4.6. for parameter descriptions).
System Base
Absolute 0 Vacuum
L_A1 Coating Base
Setpoint / Operating Pressure
}
Vacuum Units "above base"
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