Rev 37 Operator’s Manual OM-610-1002-1
page 24 SECTION 5 OPERATION PDS-2010
5.5.6 Furnace / Chamber Gauge Switch
If the PROCESS START/STOP button is depressed and active (the green button is lit), the Furnace/Chamber
Gauge switch provides power to the furnace and chamber gauge controller outputs, which in turn provide
power to the actual heater elements. When the switch is in the ENABLE position, the switch lever light
illuminates. This switch can always be used to defeat power to these heaters. Also, when either of the
computer’s fault or end-of-run shutdown timers has elapsed, these heater outputs are disabled until the
PROCESS START/STOP pushbutton is pressed.
5.5.7 Vacuum Switch
The Vacuum switch three-position switch controls the action of the vacuum system. In the VACUUM
position, the vacuum pump will engage and begin to pump the system down. When the pump is running, the
switch lever light illuminates. In the HOLD position, the pump will be disengaged and the integral isolation
valve in the pump will immediately close to preserve most of the vacuum already established in the system. In
the VENT position, the pump will remain off, and the vent solenoid valve will open to purge the system to
atmosphere.
NOTE 1: Do not
use the HOLD position to test the system for leaks. Under normal operating conditions it is
possible that contamination of the seat of the integral pump isolation valve that will allow air back through the
pump into the system. Consult the Edwards manual, specifically Section 10.
NOTE 2: There is no override provision for the vacuum control switch. Opening the vent during deposition
would be possible, but would immediately initiate the fault shutdown timer and will have a detrimental effect
on coating quality.
NOTE 3: If the 2010 is supplied with the LN
2
option, the LN
2
solenoid is enabled when the vacuum switch is
in the evacuate position. The LN
2
option not available in the European Community.
5.5.8 Vaporizer Switch
The Vaporizer switch permits the vaporizer heater elements to be energized as enabled by the sequencing
computer. When switched is in ENABLE position, the switch lever light illuminates, but the heater control
output will not be enabled until the pre-coating conditions have been met. As with the furnace and chamber
gauge heaters, when the fault or end-of-run shutdown timer of the computer has elapsed, the vaporizer heaters
are disabled until the computer is reset.
CAUTION: If the 2010 is supplied with the rotation option, the fixture rotation is
controlled with the vaporizer switch. Whenever the vaporizer switch is on, the fixture
rotates.
5.6 FUSES
To access the fuses, remove the left side panel from the machine. The fuses are located inside the frame of the
2010, below the furnace temperature controller.
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