SCS LABCOTER 2 - Default Chapter; Table of Contents

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OM-610-1002-1 Operator’s Manual Rev 37

TABLE OF CONTENTS

SECTION 1 SAFETY.............................................................................................................................1

1.1 GENERAL INFORMATION......................................................................................................... 1

1.2 VAPORIZER AND PYROLYSIS SECTION................................................................................2

1.2.1 Pyrolysis Furnace.......................................................................................................................2

1.3 DIMER LOADING DOOR............................................................................................................ 3

1.4 DEPOSITION CHAMBER VACUUM SENSOR .........................................................................3

1.5 INLET BAFFLE.............................................................................................................................3

1.6 GLASS VIEWPORTS.................................................................................................................... 3

1.7 SERVICING................................................................................................................................... 4

1.8 NITROGEN.................................................................................................................................... 4

SECTION 2 OVERVIEW......................................................................................................................5

SECTION 3 EQUIPMENT SPECIFICATION ...................................................................................7

3.1 PDS-2010 .......................................................................................................................................7

3.2 TUMBLER OPTION .....................................................................................................................7

SECTION 4 INSTALLATION.............................................................................................................. 9

4.1 PDS 2010 INSTALLATION REQUIREMENTS ..........................................................................9

4.2 ON SITE SERVICES PROVIDED BY THE CUSTOMER...........................................................9

4.3 SHIPPING DAMAGE....................................................................................................................9

4.4 UNPACKING.................................................................................................................................9

4.5 EQUIPMENT PLACEMENT ...................................................................................................... 10

4.6 INSPECTION............................................................................................................................... 10

4.7 ELECTRICAL POWER INSTALLATION................................................................................. 10

4.8 CHILLER (OPTION) .....................................................................................................................11

4.9 LIQUID NITROGEN (OPTION)...................................................................................................11

4.10 TUMBLER (OPTION)...................................................................................................................11

4.11 CONNECT AND CHECK ...........................................................................................................11

4.12 ON SITE SERVICE PROVIDED BY SCS CUSTOMER SERVICE (OPTIONAL)...................... 12

SECTION 5 OPERATION .................................................................................................................. 13

5.1 PURPOSE OF EQUIPMENT.......................................................................................................13

5.2 VACUUM CONCEPTS............................................................................................................... 13

5.2.1 Vacuum ......................................................................................................................................... 13

5.2.2 Pressure ........................................................................................................................................ 13

5.2.3 Vacuum Levels ..............................................................................................................................14

5.2.4 Vacuum Pumps.............................................................................................................................. 14

5.2.5 Gas Flow....................................................................................................................................... 14

5.2.6 Outgassing .................................................................................................................................... 15

5.2.7 Base Pressure................................................................................................................................ 16

5.2.8 Coating Pressure...........................................................................................................................16

5.3 PARYLENE DEPOSITION TECHNOLOGY............................................................................. 16

5.3.1 Parylene Types.............................................................................................................................. 16

5.3.2 Parylene Deposition...................................................................................................................... 18

5.4 CONTROL PANEL .....................................................................................................................21

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