SCS LABCOTER 2 - Page 6

Rev 37 Operator’s Manual OM-610-1002-1
5.5 PROCESS CONTROLLERS .......................................................................................................22
5.5.1 Furnace Temperature Controller.................................................................................................. 22
5.5.2 Chamber Gauge Temperature Controller..................................................................................... 22
5.5.3 Vacuum Pressure Controller ........................................................................................................22
5.5.4 Vaporizer Temperature Controller ............................................................................................... 23
5.5.5 Alarm............................................................................................................................................. 23
5.5.6 Furnace / Chamber Gauge Switch................................................................................................ 24
5.5.7 Vacuum Switch.............................................................................................................................. 24
5.5.8 Vaporizer Switch........................................................................................................................... 24
5.6 FUSES.......................................................................................................................................... 24
5.7 SEQUENCING COMPUTER......................................................................................................25
5.8 COLD TRAP OPERATION.........................................................................................................26
5.8.1 Mechanical Chiller (option).......................................................................................................... 26
5.8.2 LN
2
(option) .................................................................................................................................. 26
5.9 TUMBLER (OPTION) SPEED CONTROL ................................................................................ 27
5.10 BASE PRESSURE ....................................................................................................................... 28
5.11 AUTOMATIC COATING CYCLE .............................................................................................29
5.11.1 Dimer Boat Construction............................................................................................................29
5.11.2 System Preparation..................................................................................................................... 30
5.11.3 Start-Up....................................................................................................................................... 30
5.11.4 Computer Control Sequence....................................................................................................... 30
5.11.5 End-Of-Run.................................................................................................................................31
5.12 SUCCESSIVE RUNS...................................................................................................................32
5.13 SEMI-AUTOMATIC OPERATION............................................................................................ 32
5.14 OPERATING CONSIDERATIONS............................................................................................ 33
5.14.1 Deposition Rate........................................................................................................................... 33
5.14.2 Amount of Substrate.................................................................................................................... 33
5.14.3 Type of Substrate......................................................................................................................... 33
5.14.4 Orientation of Substrate.............................................................................................................. 33
5.14.5 Pump Down Time........................................................................................................................ 34
5.14.6 Vacuum System Leaks................................................................................................................. 34
5.14.7 Baffle........................................................................................................................................... 34
5.15 ADHESION PROMOTION (WET PROMOTION)..................................................................... 34
5.15.1 Making the Promotion Solution.................................................................................................. 35
5.15.2 Quality Check, Disposal .............................................................................................................35
5.15.3 How to Use the Promotion Solution ........................................................................................... 35
SECTION 6 MAINTENANCE............................................................................................................ 37
6.1 PARYLENE DEPOSIT REMOVAL ...........................................................................................37
6.1.1 Applying Release Agent ................................................................................................................ 37
6.1.2 Parylene Coating Removal ........................................................................................................... 37
6.1.3 Cold Trap Probe (Thimble)........................................................................................................... 38
6.1.4 Vacuum Integrity........................................................................................................................... 38
6.1.5 Vacuum Pump ............................................................................................................................... 38
6.1.6 Vacuum Gauge Port......................................................................................................................39
6.1.7 Vaporizer....................................................................................................................................... 39
6.2 LONG TERM INSPECTIONS AND MAINTENANCE ............................................................. 39
6.2.1 Pyrolysis Tube............................................................................................................................... 39
6.2.2 O-Rings, Vacuum System Seals..................................................................................................... 39
6.2.3 Vacuum Hose ................................................................................................................................ 40
6.2.4 Rotary Feed-Thru Maintenance.................................................................................................... 40