OM-610-1002-1 Operator’s Manual Rev 37
PDS-2010 INDEX page 145
INDEX
NOTE: Refer first to the Table of Contents; major subjects and activities are listed there. If you do not find what
you are looking for there, come back to the Index for smaller and more specific items.
Alarm Codes, 23
AP, Wet Promotion, 35
Base Pressure, 16, 28
Cold Trap Probe, 31, 38
Deposition Rate, 33
Environment, 7
Icon, Warning, 1
Micro-Soap, 37
milliTorr, 13
MSDS, 2
Nitrogen, 4, 11, 26
Operating Environment, 7
Outgassing, 16
Parameter (6100+) Descriptions, 51
Parylene Deposition, 18
Parylene Types, 17
Pyrolysis, 18
Release Agent, 37
Rotary Feed-Thru, 40
Silane, 2, 35
Torr, milliTorr, 13
Tumbler option, 7, 11, 27
Vacuum Leaks, 38, 39
Warning Symbol, 1
Zero Pressure Simulator, 43, 44
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